Semiconductor device having through electrodes, a manufacturing method thereof, and an electronic apparatus

ABSTRACT

A semiconductor device includes a semiconductor substrate and a through electrode provided in a through hole formed in the semiconductor substrate. The through electrode partially protrudes from a back surface of the semiconductor substrate, which is opposite to an active surface thereof. The through electrode includes a resin core and a conductive film covering at least a part of the resin core.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation application of U.S. application Ser. No.12/619,753 filed Nov. 17, 2009 which claims priority to Japanese PatentApplication No. 2008-294772 filed on Nov. 18, 2008, all of which arehereby expressly incorporated herein by reference in their entireties.

BACKGROUND

1. Technical Field

The present invention relates to a semiconductor device, a manufacturingmethod thereof, and an electronic apparatus.

2. Related Art

For multilayer semiconductor devices, accurate positioning has beenrequired to bond bumps. For this reason, bonding has been performed byapplying heat and pressure using a flip chip bonder. However, there hasbeen a problem that when using solder to bond bumps, the solderoverflows from the bonding portions due to the application of heat andpressure and thus a bonding failure easily occurs.

In the configuration described in JP-A-2001-53218, an insulating film isformed on side surfaces of back surface terminals protruding from asilicon substrate. For this reason, at the time of bonding, excessivesolder may extend to the vicinities of the terminals thereby becomingshorted to the silicon substrate. Also, there has been a problem thateven if a non-weighting bonding method, such as reflow bonding, is used,the bonding strength decreases if the tips of back surface terminals areflat surfaces as in JP-A-2001-53218.

In order to solve this problem, there has been a proposed configurationwhere Cu of side surfaces of back surface terminals is exposed and abase portion on a silicon substrate is covered by an insulating film, asshown in JP-A-2004-297019. The Cu-exposed portions on the side surfacesof the terminals contribute to solder bonding. The formed solder takes ashape having a skirt extending from the vicinities of the back surfaceterminals to terminals on an active surface of the semiconductorsubstrate (silicon substrate). Thus, a short between overflow solder andthe semiconductor substrate or a short between the terminals can beavoided. Since the bonding area is increased, the bonding strength isalso increased.

However, even if the method described in JP-A-2004-297019 is used, thesolder amount is difficult to control. Therefore, it is difficult toavoid a bonding failure completely. Also, the pitch has been narrowed tomeet the downsizing demand. However, there remains a problem that therelated-art structure uses solder bonding and therefore the pitch isdifficult to narrow.

SUMMARY

An advantage of the invention is to provide a semiconductor device thatincludes favorably bonded terminals thereby increasing reliability andcan easily correspond to terminals disposed at narrower pitches, amanufacturing method of the semiconductor device, and an electronicapparatus.

A semiconductor device according to a first aspect of the inventionincludes a semiconductor substrate and a through electrode provided in athrough hole formed in the semiconductor substrate. The throughelectrode partially protrudes from a back surface of the semiconductorsubstrate, which is opposite to an active surface thereof. The throughelectrode includes a resin core and a conductive film covering at leasta part of the resin core.

In the first aspect of the invention, the through electrode partiallyprotrudes from the back surface. When an electronic element is mountedon the semiconductor substrate, the through electrode is brought intocontact with the electronic element using deformation of the resin coreprovided inside the conductive film included in the through electrode.For this reason, the contact area of the through electrode with aterminal of the electronic element is increased. Thus, connectionreliability is increased. Also, due to elastic deformation of the resincore, the bonding strength between the through electrode and terminal isincreased. Also, pressure bonding can be performed using only the resin.

The semiconductor device according to the first aspect of the inventioncan avoid a short between overflow solder and the semiconductorsubstrate or a short between terminals, which has been a problem withrespect to bonding using a low-melting-point metal, such as solder. Forthis reason, the connection reliability is higher than that of therelated-art examples.

A tip of a protruding portion of the through electrode preferably takesthe shape of a curved surface, which is convex outwardly.

By adopting the first aspect of the invention, when bonding the throughelectrode to the terminal of the electronic element, the throughelectrode becomes deformed easily.

The protruding portion of the through electrode preferably takes atapered shape, which is tapered toward a tip.

By adopting the first aspect of the invention, the contact area of thethrough electrode with the terminal of the electronic element is furtherincreased. Thus, connection reliability is further increased.

The conductive film preferably includes at least one ductile metallicfilm.

If the conductive film includes at least one ductile metallic film byadopting the first aspect of the invention, the conductive film becomesdeformed easily together with the resin core.

A side surface of a base portion of a protruding portion of the throughelectrode is preferably covered by a base layer that is provided in thethrough hole and partially protrudes from the back surface of thesubstrate.

By adopting the first aspect of the invention, a short between thedeformed through electrode and semiconductor substrate can be avoided.

The through hole is preferably long in one direction in a plan view. Thethrough electrode preferably includes the resin core extending along thethrough hole and the conductive film that is formed on a surface of theresin core and includes a plurality of conductive films.

By adopting the first aspect of the invention, the multiple throughelectrodes are provided in the opening of the one through hole. This canmake the pitch narrower thereby downsizing the device.

An electrode terminal electrically connected to the conductive film ispreferably formed on the active surface of the semiconductor substrate.

By adopting the first aspect of the invention, the tip of the throughelectrode protruding from the back surface can function as a terminal tobe connected to the terminal of the electronic element.

A semiconductor device manufacturing method according to a second aspectof the invention includes: (a) forming a via from an active surface of asemiconductor substrate; (b) forming a base layer on an inner surface ofthe via; (c) forming a conductive film on the base layer; (d) fillingthe via with a resin; (e) thinning down the semiconductor substrate sothat the via passes through the semiconductor substrate; and (f)exposing the conductive film by eliminating the base layer protrudingfrom a back surface opposite to the active surface.

By adopting the second aspect of the invention, a semiconductor devicehaving a structure where a resin core bump protrudes from the backsurface of the semiconductor substrate can be obtained. Thus, a shortbetween overflow solder and the semiconductor substrate or a shortbetween terminals, which has been a problem with respect to bondingusing a low-melting-point metal, such as solder, can be avoided. Thus, asemiconductor device having high connection reliability can be obtained.

Also, the step of forming a resin core bump and the step of forming athrough electrode are combined, so the cost can be significantlyreduced.

In step (a), a bottom surface of the via is preferably formed in theshape of a curved surface.

By adopting the second aspect of the invention, the tip of the throughelectrode is formed in the shape of a curbed surface. Thus, the tipbecomes a terminal that becomes deformed easily when bonding and canreliably obtain bonding strength.

In step (a), the via is preferably formed in a tapered shape.

By adopting the second aspect of the invention, a through electrode thatcan further increase the contact area thereof with a terminal of anelectronic element can be formed. Thus, connection reliability isfurther increased.

In step (f), the base layer is preferably partially left on a baseportion of a protruding portion of the through electrode.

By adopting the second aspect of the invention, when bonding thesemiconductor substrate and electronic element together, a short betweenthe deformed through electrode (conductive film) and semiconductorsubstrate can be avoided.

The semiconductor device manufacturing method according to the secondaspect of the invention preferably further includes (g) patterning theconductive film into a plurality of areas after step (c). In step (a),the via is preferably formed in such a manner that the via is long inone direction in a plan view.

By adopting the second aspect of the invention, the multiple throughelectrodes are formed in the one through hole. This can make the pitchbetween terminals narrower thereby downsizing the device.

The semiconductor device manufacturing method according to the secondaspect of the invention further includes (h) forming on the activesurface of the semiconductor substrate an electrode terminalelectrically connected to the conductive film.

By adopting the second aspect of the invention, the front surface andback surface of the semiconductor substrate are electrically connectedto each other at the same time that the resin core bump is formed. Thus,the manufacturing process can be reduced.

An electronic apparatus according to a third aspect of the inventionincludes the semiconductor device according to the first aspect of theinvention.

By adopting the third aspect of the invention, an electronic apparatushaving increased connection reliability can be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like reference numerals represent like elements.

FIG. 1 is a sectional view showing a schematic configuration of asemiconductor device according to a first embodiment of the invention.

FIG. 2 is a flowchart showing a method for manufacturing thesemiconductor device according to the first embodiment.

FIGS. 3A to 3G are sectional views showing steps of the method formanufacturing the semiconductor device according to the firstembodiment.

FIGS. 4H to 4J are sectional views showing steps of the method formanufacturing the semiconductor device according to the firstembodiment.

FIGS. 5K to 5N are sectional views showing steps of the method formanufacturing the semiconductor device according to the firstembodiment.

FIGS. 6O to 6Q are sectional views showing steps of the method formanufacturing the semiconductor device according to the firstembodiment.

FIG. 7 is a sectional view showing a step of the method formanufacturing the semiconductor device according to the firstembodiment.

FIGS. 8A and 8B are drawings showing a schematic configuration of asemiconductor device according to a second embodiment of the invention.

FIGS. 9A and 9B are drawings showing steps of a method for manufacturingthe semiconductor device according to the second embodiment.

FIG. 10 is a perspective view showing a circuit substrate, which is anexample of an electronic apparatus.

FIG. 11 is a perspective view showing a cell phone, which is an exampleof an electronic apparatus.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Now, embodiments of the invention will be described with reference tothe accompanying drawings. In order to make the members of theembodiments recognizable in the drawings, each member is scaled up ordown as appropriate.

First Embodiment

Hereafter, a semiconductor device and a manufacturing method thereofaccording to a first embodiment of the invention will be described.

Semiconductor Device

FIG. 1 is a sectional view showing a schematic configuration of asemiconductor device 1 according to this embodiment.

As shown in FIG. 1, the semiconductor device 1 includes a semiconductorsubstrate 10 obtained by forming an integrated circuit (not shown)including a transistor, a memory element, and other electronic elements,and the like on one surface of a silicon base material, which isobtained by cutting a silicon wafer, using a known method. Hereafter, asurface having the integrated circuit and the like formed thereon, ofthe semiconductor substrate 10 will be referred to as an “active surface10A” and a surface opposite to the active surface 10A will be referredto as a “back surface 10B.” The semiconductor substrate 10 is made of,for example, a rectangular silicon substrate. Instead, for example, aceramic substrate or a resin substrate may be used.

Also, the semiconductor device 1 according to this embodiment includesmultiple through electrodes 5 passing through the active surface 10A andback surface 10B of the semiconductor substrate 10, multiple electrodepads 300 (electrode terminals) provided on the active surface 10A, andmultiple bump electrodes 5A provided on the back surface 10B.

The electrode pads 300 are made of, for example, Al. The electrode pads300 may be, for example, electrode pads each formed by laminatingmultiple metallic films, and the material thereof may be changed asappropriate in accordance with the electrical characteristics or thelike required by the electrode pads 300. The electrode pads 300 areconnected to the integrated circuit formed on the active surface 10A. Inaddition, electrode pads 3 for re-disposition wiring lines are formed onthe active surface 10A.

The through electrodes 5 are disposed in through holes 7 passing throughthe semiconductor substrate 10 in the substrate thickness direction.Each through electrode 5 includes a resin core 9 disposed in the throughhole 7 and a conductive film 15 covering a surface of the resin core 9.A part of each through electrode 5 protrudes from an opening 7B on theback surface 10B, of the through hole 7. The protruding portions serveas bump electrodes 5A to be electrically bonded to terminals 61 (FIG.6O) of an electronic element 60 to be described later. The bumpelectrodes 5A according to this embodiment are so-called “resin corebumps” using, as the core, the conductive film 15 and the resin core 9provided inside the conductive film 15.

The through holes 7 according to this embodiment each take a cylindricalshape. A base layer 11, a metallic layer 13, and the conductive film 15are disposed on an inner surface 7 a of each through hole 7 in the orderpresented. The resin core 9 is embedded in the center of the throughhole 7.

The base layer 11 is made of SiO₂ (silicon oxide), but not limitedthereto. A nitride film or a resin material, such or an epoxy, may beused. The base layer 11 is provided to prevent a current leak betweeneach metallic layer 13 and semiconductor substrate 10 and erosion or thelike of the semiconductor substrate 10 due to oxygen, water, or thelike. The base layer 11 is formed as covering not only the innersurfaces of the through holes 7 but also almost the entire activesurface 10A except for portions of the electrode pads 300.

The metallic layers 13 are made of a metallic material, such as TiW(titanium tungsten), and have a function of ensuring the adhesionbetween the conductive films 15 and base layer 11 so as to bond both thelayers together favorably. Each metallic layer 13 is formed as coveringnot only the inner surface 7 a of the through hole 7 but also a part ofthe base layer 11 near the through hole 7 on the active surface 10A, andalso extends onto a layer below the electrode pad 3.

An end 11 b of the base layer 11 and an end 13 b of the metallic layer13 extend from each through hole 7 in such a manner that these endsprotrude from the back surface 10B to a midpoint of the protrusionlength of the bump electrode 5A, as shown in FIG. 1. In other words,both the ends cover the side surface of the base portion of the bumpelectrode 5A near the back surface 10B.

The conductive films 15 are each a single layer of a ductile metallicfilm made of Au, TiW, Cu, Cr, Ni, Ti, W, NiV, Al, Pd, lead-free solder,or the like, or a lamination of layers made of some among these metals.The conductive films 15 become deformed elastically together with theresin cores 9 when bonded to the terminals of the electronic element tobe described later, so Au having particularly good ductility ispreferably used.

Each conductive film 15 is electrically connected to the electrode pad 3that is formed on the active surface 10A as covering the metallic layer13.

Each resin core 9 is disposed in the center of the through hole 7 asembedded in the through hole 7 and is made of a photosensitiveinsulating resin, a thermosetting insulating resin, or the like, such asa polyimide resin, an acrylic resin, a phenolic resin, a silicone resin,a silicone-modified polyimide resin, or an epoxy resin. The material(hardness) and shape of the resin cores 9 are selected or designed asappropriate in accordance with the shape of the bump electrodes 5A, orthe like.

In the semiconductor device 1 according to this embodiment, the tip ofeach bump electrode 5A takes a hemispheric shape. Thus, when theelectronic element is mounted, each bump electrode 5A becomes deformedso that each bump electrode 5A is electrically and favorably connectedto the corresponding electrode terminal on the electronic element.

Semiconductor Device Manufacturing Method

Next, a method for manufacturing the semiconductor device 1 will bedescribed with reference to FIGS. 2 to 7. FIG. 2 is a flowchart showinga method for manufacturing the semiconductor device 1. FIGS. 3A to 7 aredrawings showing steps of the method for manufacturing the semiconductordevice 1. In this embodiment, a manufacturing method in which themultiple semiconductor devices 1 are formed on a silicon wafer 100simultaneously and collectively using the W-CSP (wafer level chip scalepackage) technology, re-disposition wiring lines are formed, and thenthe collective semiconductor devices 1 are diced into individualsemiconductor devices 1 will be described.

FIGS. 3A to 7 showing the midway steps for manufacturing thesemiconductor devices 1 are simplified drawings and show onesemiconductor device 1 formed on the silicon wafer 100. It is assumedthat the silicon wafer 100 and semiconductor substrate 10 to be used todescribe the manufacturing process are identical to each other.

First, as shown in FIG. 3A, vias 7 b are made on the active surface 10Aof the semiconductor substrate 10 on which the integrated circuit isformed (S1). In this embodiment, the vias 7 b having a diameter of 50 μmand a depth of 100 μm are made in predetermined positions of a siliconbase material having a thickness of 625 μm using dry etching. In thiscase, adjustment is made so that the bottom surfaces of the vias 7 b arecurved. As for etching, a SiO₂ film may be used as a photoresist mask ora hard mask. Also, both a photoresist mask and a hard mask may be used.The etching method is not limited to dry etching. Wet etching or lasertreatment or both may be used.

Next, as shown in FIG. 3B, the base layer 11 is formed as covering theactive surface 10A of the semiconductor substrate 10 and the innersurfaces of the vias 7 b (S2). In this case, a SiO₂ film is formed witha thickness of 3000 Å or more using CVD. While SiO₂ is used in thisembodiment, tetra ethyl ortho silicate (Si(OC₂H₅)₄; hereafter referredto as “TEOS”) formed using PECVD (plasma enhanced chemical vapordeposition), that is, PE-TEOS and TEOS (O₃-TEOS) formed using ozone CVDmay be used.

Next, as shown in FIG. 3C, a TiW film 13A is formed on the base layer11(S3). In this case, the TiW film 13A is formed with a thickness of1000 Å on the active surface 10A of the semiconductor substrate 10 andinside the vias 7 b using sputtering.

Next, as shown in FIG. 3D, an Au film 15A is formed on the metalliclayer 13 (S4). In this case, the Au film 15A is formed with a thicknessof 5000 Å on the active surface 10A of the semiconductor substrate 10and inside the vias 7 b using sputtering.

Subsequently, as shown in FIG. 3E, the Au film 15A and TiW film 13A aresimultaneously patterned using known photolithography and etching. Atthat time, portions of the Au film 15A and TiW film 13A near the vias 7b on the active surface 10A are left, while the other portions thereofare eliminated. Thus, the conductive films 15 covering the innersurfaces of the vias 7 b and the electrode pads 3 electrically connectedto the conductive films 15 near the vias 7 b on the active surface 10Aare formed (S5). Also, the metallic layers 13 are formed below theconductive films 15 and electrode pads 3 in the same shape as those ofthese films.

Since the Au-sputtered film is formed on the TiW-sputtered film asadhering thereto, the adhesion between the base layer 11 and conductivefilm 15 or electrode pad 3 is ensured by each metallic layer 13. Ifnecessary, the resistance value may be lowered using Au plating or thelike. Also, in order to ensure the adhesion with a resin material forfilling the vias 7 b in a later step, another metallic layer may beformed.

Next, as shown in FIG. 3F, the vias 7 b become filled with the resinmaterial so that the resin cores 9 are formed (S6). In this case,polyimide is used. In this embodiment, the bottom surfaces of the vias 7b are curved, so the vias 7 b become filled while preventing entry ofbubbles or the like into the resin.

Next, as shown in FIG. 3G, a first inter-layer insulating layer 17thicker than the electrode pads 3 is formed on the active surface 10A ofthe semiconductor substrate 10 (S7). In this case, a photosensitiveresin layer, such as an epoxy resin or a polyimide resin, is applied tothe active surface 10A and then exposed and developed so that an opening17 a for exposing a part of each electrode pad 3 is made on thephotosensitive resin layer. The opening 17 a may be formed using dryetching or the like. In this way, the first inter-layer insulating layer17 is formed on the active surface 10A.

Next, as shown in FIG. 4H, a re-disposition wiring line 19 is formed onthe first inter-layer insulating layer 17 as connected to the electrodepad 3 via the opening 17 a (S8). The re-disposition wiring line 19 ismade of a material including at least one of Cu, Cr, Ti, Ni, TiW, Au,Ag, Al, NiV, W, TiN, and Pd and is formed using, for example,sputtering. Also, a wiring layer may be formed by laminating at leasttwo of these materials.

Next, as shown in FIG. 4I, a second inter-layer insulating layer 21 isformed on the first inter-layer insulating layer 17 (S9). The materialof the second inter-layer insulating layer 21 may be the same as that ofthe first inter-layer insulating layer 17. First, a photosensitive resinis applied to an entire surface of the first inter-layer insulatinglayer 17. Subsequently, the photosensitive resin layer is exposed anddeveloped so that an opening 21 a for exposing a part of there-disposition wiring line is formed on the photosensitive resin layer.

Next, as shown in FIG. 4J, the semiconductor substrate 10 is thinneddown from the back surface 10B (S10).

First, the active surface 10A of the semiconductor substrate 10 havingthe electrode pads 3 formed thereon is supported by a supporting member120 that is disposed with an adhesive 121 between the supporting member120 and active surface 10A and is made of a glass substrate or the like.Subsequently, the semiconductor substrate 10 is polished down to apredetermined thickness by performing, for example, CMP (chemicalmechanical polishing) on the back surface 10B of the semiconductorsubstrate 10 in a state where the semiconductor substrate 10 is bondedto the supporting member 120. Specifically, the treatment is performeduntil immediately before the base layer 11 is exposed. By reinforcingthe semiconductor substrate 10 using the supporting member 120, warpageon the semiconductor substrate 10 is corrected and occurrence of a crackduring treatment or handling is prevented.

Next, as shown in FIG. 5K, the thickness of the semiconductor substrate10 is selectively reduced using dry etching, wet etching, or the like sothat the vias 7 b pass through the semiconductor substrate 10 as thethrough holes 7 and that portions 50 to serve as the through electrodes5 later protrude from the back surface 10B of the semiconductorsubstrate 10 with a predetermined protruding amount (S11). It ispreferable to use an etching method by which the base layer 11 is etchedsufficiently more slowly than silicon. If dry etching is used, inductivecoupling plasma etching (ICP) or the like can be used. If wet etching isused, the above-mentioned portions S50 can protrude by using HF, HNO3, amixed liquor thereof, KOH or the like as an etchant. The protrudingamount L1 of each portion 50 is set to 2 to 20% or so of the post lengthL.

Next, as shown in FIG. 5L, exposed portions of the base layer 11 areeliminated so that the metallic layers 13 below the base layer 11 arepartially exposed (S12). The base layer 11 is eliminated using dryetching, wet etching, or the like. If dry etching is used, reactive ionetching (RIE) can be used. In this case, CF₄, O₂, or the like is used asa gas. If wet etching is used, an etchant that can eliminate the baselayer 11 without affecting the TiW layer must be selected. If the baselayer 11 is made of SiO₂, diluted hydrofluoric acid is used.

Also, when causing the portions 50 to protrude from the silicon basematerial in the previous step, the base layer 11 may be eliminated usingwet etching until the metallic layers 13 are exposed. In this case, itis possible to perform both the elimination of the base layer 11 and theexposure of the metallic layers 13 in one step.

Next, as shown in FIG. 5M, the semiconductor substrate 10 is selectivelythinned down by performing silicon etching again. Thus, the ends 11 b ofthe base layer 11 protrude with a predetermined protruding amount (S13).If dry etching is used, ICP-RIE (inductive coupled plasma-reactive ionetching) is used. In this case, the protruding amount L2 of the baselayer 11 is set to 2 to 20% or so of the post length L.

Next, as shown in FIG. 5N, exposed portions of the metallic layers 13are eliminated so that the metallic layers 15 are exposed (S14). Byeliminating the metallic layers 13 exposed from the base layer 11, theends 13 b of the metallic layers 13 match the ends 11 b of the baselayer 11.

The metallic layers 13 are eliminated using wet etching, since they aremade of TiW. Thus, the conductive films 15 are exposed. No oxide film isformed on Au; therefore, even if the conductive films 15 are leftexposed until the electronic element is mounted, connection reliabilityat the time of mounting can be ensured.

In this way, the through electrodes 5 passing through the semiconductorsubstrate 10 and the bump electrodes 5A protruding from the back surface10B of the semiconductor substrate 10 are formed. Simultaneously, thefront surface and back surface of the semiconductor substrate 10 areelectrically connected to each other by the through electrodes 5.

Next, as shown in FIGS. 6O to 6Q, the process of laminating, on thesemiconductor device 1, the electronic element 60 having terminalsarranged on the surface thereof opposed to the semiconductor device 1 inthe same way that the bump electrodes 5A are arranged will be described.

In order to laminate the electronic element 60 on the semiconductordevice 1, first, for example, thermosetting resins 53 are disposed onthe upper surface (back surface 10B) of the semiconductor device 1 (S15)and, for example, are heated so that the resins are semi-cured.Subsequently, the electrode bumps of the semiconductor device 1 and theelectrode terminals 61 formed on the electronic element 60 to belaminated are positioned with respect to each other so that theelectrode bumps and terminals 61 overlap each other in a plan view.Thus, the electronic element 60 is laminated on the semiconductor device1 with the resins 53 interposed therebetween.

Next, as shown in FIG. 6P, heat and pressure are applied in thedirections in which the semiconductor device 1 and electronic element 60are bonded together in a state where the bump electrodes 5A of thesemiconductor device 1 and the electrode terminals 61 of the electronicelement 60 are opposed to each other (S16). Thus, the conductive films15 of the bump electrodes 5A are brought into electrical contact withthe electrode terminals 61 while the resins 53 are crushed.

Subsequently, when higher pressure is applied (S17), the bump electrodes5A are crimped onto the electrode terminals 61 so that the bumpelectrodes 5A become deformed and the contact area of each bumpelectrode 5A with the corresponding electrode terminal 61 is increased,as shown in FIG. 6Q. As a result, the bump electrodes 5A and electrodeterminals 61 are reliably electrically connected to each other. At thattime, the bump electrodes 5A easily become deformed, since the tipsthereof take the shape of a hemisphere. The ends 11 b of the base layer11 protruding from the openings 7A on the back surface, of the throughholes 7 avoid, for example, the deformed bump electrodes 5A frombecoming shorted to the semiconductor substrate 10.

Since the load imposed by pressing the electronic element 60 is absorbedby the deformation of the bump electrodes 5A, breakage of thesemiconductor device 1 when laminating the electronic element 60 isprevented.

After laminating the electronic element 60, the semiconductor substrate10 and electronic element 60 are left alone until the softened resins 53are cured (S18). At that time, the resins may be actively cooled downand thus cured. By curing the resins 53, the bonding among thesemiconductor devices 1 is maintained. Also, a photosetting resin may beused as the material of the resins 53. In this case, by applying lightto the photosetting resin, the bonding function thereof is exhibited.

Next, as shown in FIG. 7, the supporting member 120 supporting thesemiconductor substrate 10 is peeled off and then solder balls 23 madeof, for example, lead-free solder are formed on the openings 21 aprovided on the second inter-layer insulating layer 21 (S19). Instead ofproviding the solder balls 23, solder paste may be printed on there-disposition wiring lines 19 exposed from the openings 21 a.

Subsequently, the silicon wafer 100 is cut along the dicing lines D sothat individual semiconductor devices 1 are obtained (S20).

In this way, the semiconductor devices 1 are manufactured.

By adopting the semiconductor device 1 according to this embodiment, thebump electrodes 5A become compressed and deformed when relativelypressurizing the electronic element 60 toward the semiconductor device 1in order to mount the electronic element 60. Thus, the contact area ofeach bump electrode 5A with the corresponding electrode terminal 61 isincreased so that the connection strength is ensured. Thus, theconnection reliability at the time of bonding is increased.

Also, when the resin cores 9 become deformed elastically, elasticityrestoring forces (repulsion) act on the electrode terminals 61. Thus,the bonding strength between the bump electrodes 5A and electrodeterminals 61 is increased. As a result, the reliability of theelectrical connection state is increased.

Also, by adopting the manufacturing process according to thisembodiment, the step of forming the bump electrodes 5A and the step ofconnecting the front and back surfaces electrically are combined. Thiscan reduce the manufacturing time. Also, the reduction in the number ofsteps can reduce the cost significantly.

Also, the bonding structure according to this embodiment allowsavoidance of a short between overflow solder and semiconductor substrate10 (silicon substrate) or a short between the terminals, which has beena problem with respect to bonding using a low-melting-point metal, suchas solder. Thus, a semiconductor device having high connectionreliability is obtained. Also, since the bonding structure according tothis embodiment allows mounting of an electronic element havingterminals arranged thereon at a narrow pitch, a device as a whole can befurther downsized.

The metallic layers 13 are intended to ensure the adhesion between thebase layer 11 and conductive films 15. If the conductive films 15 aremade of a material having good adhesiveness to the base layer 11, themetallic layers 13 do not necessarily need to be provided.

In the first embodiment, the tip of each bump electrode 5A is curved inthe form of a hemisphere; however, the tip may be flat.

In a case where multiple semiconductor chips are laminated as theelectronic elements 60 on the semiconductor device 1, by laminating asemiconductor chip having terminals arranged thereon in the same way asa semiconductor chip below the semiconductor chip, on the lattersemiconductor chip one after another, the terminals of eachsemiconductor chip and those of the immediately upper semiconductor chipare favorably connected to each other.

Second Embodiment

Next, a second embodiment of the invention will be described. FIG. 8A isa sectional view showing a schematic configuration of a semiconductordevice 30 according to the second embodiment. FIG. 8B is an enlargedperspective view showing a connecting portion 38 of the semiconductordevice 30 according to the second embodiment. The semiconductor device30 according to this embodiment to be shown below is approximately thesame as the above-mentioned first embodiment except for theconfiguration of through electrodes 32 (bump electrodes 32A) and themanufacturing method thereof. Accordingly, the through electrodes 32(bump electrodes 32A) and the manufacturing method thereof will bedescribed in detail and the common elements will not be described. Also,same elements as those in FIGS. 1 to 7 will be assigned same referencenumerals in the drawings used for description.

As shown in FIGS. 8A and 8B, the semiconductor device 30 according tothis embodiment includes the connecting portions 38 that each includethe multiple through electrodes 32 provided in one through hole 34 madeon the semiconductor substrate 10.

The multiple through electrodes 32 each include a resin core 41extending inside the through hole 34, which is long in one direction ina plan view, along the extending direction of the through hole 34 and astripe-shaped conductive film 43 that partially covers the surface ofthe resin core 41 (including the surface of the end thereof protrudingfrom an opening 34B). The conductive films 43 are disposed at equalintervals in the length direction of the through hole 34. Thus, thefront and back surfaces of the semiconductor substrate 10 areelectrically connected to each other.

The ends protruding from the back surface 10B, of the through electrodes32 serve as the bump electrodes 32A according to this embodiment.

In the connecting portion 38 as described above, the surface of eachresin core 41 between the conductive films 43 is partially exposed.

The through hole 34 takes a rectangular shape in a plan view and takes atapered shape, which is tapered down toward the back surface 10B in thesubstrate thickness direction, in a cross section. The taper angle isset as appropriate and is not limited to that shown in FIGS. 8A and 8B.

Disposed in the through hole 34 are the base layer 11, multiple metalliclayers 42 and multiple conductive films 43, and resin cores 41 that fillthe gap in the through hole 34. The surface of an end 41 b of each resincore 41 is partially covered by the corresponding stripe-shapedconductive film 43.

The base layer 11 is formed in such a manner that it covers the activesurface 10A of the semiconductor substrate 10 and the entire innersurface of the through hole 34 and in such a manner that the ends 11 bprotruding from the back surface 10B cover the base portion of theconnecting portion 38 (bump electrodes 32A).

Each metallic layer 42 and the corresponding conductive film 43 areformed with approximately the same width and are partially laminated inthe length direction thereof. An end 42 b of each metallic layer 42protrudes from an opening 34B on the back surface 10B, of the throughhole 34 and extends to the position of the end 11 b of the base layer11. In this embodiment, each metallic layer 42 is provided in the areawhere the corresponding conductive film 43 and base layer 11 arestacked. Thus, the adhesiveness of each conductive film 43 to the baselayer 11 is ensured.

Also, each metallic layer 42, which is drawn from an opening 34A on theactive surface 10A, of the through hole 34, is formed with a sizeincluding at least the area of the active surface 10A on which theelectrode pad 3 is to be formed and as partially covering the base layer11 near the opening 34A. Since the electrode pads 3 are formed on themetallic layers 42, the adhesion between the electrode pads 3 and baselayer 11 is ensured.

The multiple electrode pads 3 are provided along the length direction ofthe through hole 34 and bonded (electrically connected) to theconductive films 43.

For the bump electrodes 32A having the above-mentioned configuration,the portion covered by the conductive film 43, of the end 41 b of theresin core 41 becomes an area to be connected to the terminal 61 of theelectronic element 60 to be described later. A part of the conductivefilm 43 in this area substantially functions as an electrode. That is,the exposed portion of each conductive film 43 and the resin core 41located inside the exposed portion function as an independent bumpelectrode 32.

Next, a method for manufacturing the semiconductor device 30 accordingto the second embodiment will be described with reference to FIGS. 8Aand 8B. The process of mounting an electronic element will be describedwith reference to FIGS. 9A and 9B. While FIGS. 3A to 7 will be referredto with respect to the same steps as those in the above-mentioned firstembodiment, the description of such steps will be partially omitted.

Vias that each shrink in the substrate thickness direction from theactive surface 10A of the semiconductor substrate 10 toward the backsurface 10B thereof and are tapered in a sectional view are formed. Thewidth of the bottom of each via is set to 50 μm and the length in thesurface direction of the substrate, of each via is set to 200 μm. Thevias are formed using dry etching so that each via takes a rectangularshape in a plan view. In this case, adjustment is made so that thebottom of each via is curved.

Next, the base layer 11 made of SiO₂, a TiW-sputtered film, and anAu-sputtered film are formed as covering the active surface 10A of thesemiconductor substrate 10 and the inner surfaces of the vias.

Subsequently, by patterning the TiW film and Au film simultaneously, themultiple stripe-shaped conductive films 43 are formed as extending inthe width direction of the through hole and as arranged at equalintervals in the length direction thereof, and the electrode pads 3 areformed as bonded to the conductive films 43. At that time, by patterningthe TiW film simultaneously, each metallic layer 42 is formed below theelectrode pad 3 and conductive film 43 in such a manner that the TiWfilm is partially left in the area where the electrode pad 3 andconductive film 43 are stacked.

In this embodiment, a photosensitive resist is applied to the Au filmusing spray coating and then exposed and developed. Subsequently, wetetching is performed on the Au film and TiW film using the resist as amask. Thus, the metallic layers 42 and conductive films 43 are patternedinto stripes (wiring lines), and the electrode pads 3 are patterned intopredetermined shapes. The pitch between the multiple multilayer bodieseach including the conductive film 43 and metallic layer 42 is set to 20μm.

The metallic layers 42 and conductive films 43 may be formed by etchingthe Au film and TiW film using photolithography or may be directlyformed by discharging a conductive liquid onto the active surface 10Ausing inkjet

Next, the through holes 34 become filled with a resin so that the resincores 41 are formed. Subsequently, the semiconductor substrate 10 isthinned down from the back surface 10B so that the vias pass through thesemiconductor substrate 10 and the base layer 11 is exposed.Subsequently, the exposed base layer 11 is eliminated so that themultiple metallic layers 42 and parts of the resin cores 41 between themetallic layers 42 are exposed. Dry etching or wet etching is used toeliminate the base layer 11. The base layer 11 is eliminated in such amanner that the ends 11 b of the base layer 11 protrude from the opening34B on the back surface 10B, of each through hole 34 with apredetermined amount.

Next, the exposed metallic layers 42 are eliminated using wet etching sothat the conductive films 43 below the metallic layers 42 are exposed.At that time, the resin cores 41 exposed between the metallic layers 42are slightly eliminated. If the surface of any resin core 41 protrudesfrom the surface of the corresponding to conductive film 43, the resincore 41 is partially etched. It is preferable at least that the surfaceof each resin core 41 not protrude higher than the surface of thecorresponding to conductive film 43. It is more preferable that thesurface of each conductive films 43 protrude higher than the surface ofthe corresponding resin core 41. Thus, the bump electrodes 32A arefavorably connected to the electrode terminals 61 of the electronicelement 60.

In this way, the multiple through electrodes 32 are formed in each ofthe through holes 34 passing through the semiconductor substrate 10 inthe thickness direction thereof and, simultaneously, the multiple bumpelectrodes 32A protruding from the back surface 10B of the semiconductorsubstrate 10 are formed. Thus, the connecting portions 38 to beconnected to the electronic element 60 are formed on the back surface10B of the semiconductor substrate 10.

The subsequent steps of forming the first inter-layer insulating layer17, re-disposition wiring line 19, second inter-layer insulating layer21, solder ball 23, and the like and the subsequent dicing step are thesame as those in the above-mentioned embodiment (see FIGS. 3G to 7) andwill not be described.

Next, as shown in FIG. 9A, the electronic elements 60 are laminated onthe obtained individual semiconductor devices 30 according to thisembodiment. Each semiconductor device 30 and the correspondingelectronic element 60 are positioned with respect to each other in sucha manner that the bump electrodes 32A and electrode terminals 61 areopposed to each other, and are then subjected to application of heat andpressure in such a manner that the resins 53 for bonding are interposedtherebetween. Subsequently, as shown in FIG. 9B, the conductive films 43of the bump electrodes 32A are brought into electrical contact with theelectrode terminals 61. By further applying pressure, the connectingportions 38 are pressed by the electronic element 60 and thus compressedand deformed. When the bump electrodes 32A become deformed, the contactarea of each bump electrode 32A with the corresponding electrodeterminal 61 is increased. Thus, the bump electrodes 32A and electrodeterminals 61 are reliably electrically connected to each other. At thattime, the base layer 11 protruding the openings 34B on the back surface,of the through holes 34 avoids the deformed bump electrodes 32A frombecoming shorted to the semiconductor substrate 10.

Also, portions that are not covered by the conductive films 43, that is,are exposed, of the resin cores 41 are directly bonded to the electronicelement 60. In this case, if a heat-adhesive, insulating material thatis identical to the material of the resins 53 for bonding thesemiconductor device 30 and electronic element 60 together and exhibitsadhesiveness when heated is adopted as the material of the resin cores41, it is possible to provide, to the resin cores 41, a function ofadhering to the electronic element 60. Due to the adhesion of both theresins 53 and resin cores 41 to the electronic element 60, theelectrical contact of the bump electrodes 32A with the electrodeterminals 61 is maintained.

In this way, the electronic elements 60 are mounted on the semiconductordevices 30.

By adopting this embodiment, the multiple bump electrodes 32A aredisposed and formed inside one through hole 34 (opening 34B). Thus, thepitch can be further narrowed to approximately 20 μm or less. For thisreason, it is expected that the device will be significantly downsized.Also, since the bonding strength is ensured due to the adhesion to theresin cores 41 to the electronic element 60, a reliable semiconductordevice 30 can be obtained.

Also, in this embodiment, the bump electrodes 32A are tapered, so thecontact area of each bump electrode 32A with the corresponding electrodeterminal 61 of the electronic element 60 is increased. Thus, theconnection reliability is further increased.

While the exemplary embodiments of the invention have heretofore beendescribed with reference to the accompanying drawings, the invention isnot limited thereto and the above-mentioned embodiments may be combined.Obviously, those skilled in the art can conceive various changes andmodifications to the embodiments without departing from the technicalideal described in the appended claims. Therefore, it should beunderstood that such changes and modifications also fall with thetechnical scope of the invention.

While a case where the semiconductor devices 1 or 30 are simultaneouslyand collectively formed on the silicon wafer 100 has been described inthe above-mentioned embodiments, the semiconductor device 1 or 30 may beformed on the semiconductor substrate 10 on a one-by-one basis.

Also, in the above-mentioned embodiments, the multiple electronicelements 60 having terminals arranged thereon in the same way, such asmemory ICs, are laminated on the semiconductor device 1 or 30; however,semiconductor chips or electronic elements having terminals arrangedthereon in different ways may be laminated.

As the electronic element, a surface acoustic wave element, a quartzcrystal resonator, a piezoelectric resonator, a piezoelectric tuningfork, or the like may be connected to the semiconductor device 1 or 30.

Electronic Apparatus

Next, a circuit substrate 150 (electronic apparatus) including thesemiconductor device 1 according to the invention will be described.FIG. 10 is a perspective view showing a schematic configuration of acircuit substrate according to an embodiment of the invention. As shownin FIG. 10, a multilayer body 2 where semiconductor chips or the likeare laminated on the semiconductor device 1 is mounted on the circuitsubstrate 150 according to this embodiment. The circuit substrate 150 isan organic substrate, such as a glass epoxy substrate, and is formed insuch a manner that wiring patterns (not shown) made of copper or thelike serve as a desired circuit. Electrode pads (not shown) are providedon these wiring patterns.

The multilayer body 2 is mounted on the circuit substrate 150 in such amanner that the solder balls 23 of the semiconductor device 1 areelectrically connected to the electrode pads.

By adopting the circuit substrate 150 according to the invention, themultilayer body 2 including the semiconductor device 1 not requiring aninterposer substrate can be mounted on the circuit substrate 150.

Also, since a break in the re-disposition wiring lines is prevented andthe semiconductor device 1 is downsized and thinned, the circuitsubstrate 150 provided with the multilayer body 2 including thesemiconductor device 1 is also downsized, and the reliability thereof ishigh.

Next, an electronic apparatus including the circuit substrate 150according to the invention will be described. FIG. 11 shows a cell phone300 serving as an electronic apparatus according to an embodiment of theinvention. The cell phone 300 includes the circuit substrate 150.

Since the cell phone 300 according to the invention includes theabove-mentioned small, highly reliable circuit substrate 150, the cellphone 300 is also small and highly reliable.

The electronic apparatus according to the invention is not limited tothe cell phone 300 and is applicable to various electronic apparatuses.The electronic apparatus according to the invention is applicable toelectronic apparatuses, such as a liquid crystal projector, a personalcomputer (PC) corresponding to multi-media, an engineering workstation(EWS), a pager, a word processor, a television set, a view finder-typeor monitor direct view-type video tape recorder, an electronic notepad,an electronic desk calculator, a car navigation system, a POS terminal,and an apparatus equipped with a touch panel.

What is claimed is:
 1. A semiconductor device, comprising: asemiconductor substrate having a first surface and a second surfaceopposite to each other; a through hole provided in the semiconductorsubstrate; an insulation film provided along an inner surface of thethrough hole; a metal layer provided along an inner surface of theinsulating film in the through hole, a metal layer tip of the metallayer protruding relative to the second surface of the semiconductorsubstrate; a through electrode provided along an inner surface of themetal layer in the through hole, a through electrode tip of the throughelectrode protruding relative to the second surface of the semiconductorsubstrate; a resin provided along an inner surface of the throughelectrode in the through hole, the resin being located inside thethrough electrode, a resin tip of the resin protruding relative to thesecond surface, wherein the through electrode tip is a bump electrode,the insulation film and the metal layer are provided between the innersurface of the through hole and the through electrode, and the metallayer tip terminates at a location between the through electrode tip ofthe through electrode and the second surface of the semiconductorsubstrate.
 2. The semiconductor device according to claim 1, wherein thethrough electrode tip has a curved surface.
 3. The semiconductor deviceaccording to claim 1, wherein the through electrode is elasticallydeformable together with the resin.
 4. The semiconductor deviceaccording to claim 1, wherein the through electrode has a tapered shape,the tapered shape being tapered toward the through electrode tip of thethrough electrode.
 5. The semiconductor device according to claim 1,wherein the through electrode includes at least one ductile metallicfilm.
 6. The semiconductor device according to claim 1, wherein theinsulation film protrudes relative to the second surface of thesemiconductor substrate.
 7. An electronic apparatus, comprising: thesemiconductor device according to claim 1; an electronic element facingthe semiconductor substrate, the electronic element including a padformed on the electronic element; and a thermosetting resin providedbetween the semiconductor device and the electronic element, thethermosetting resin being located outside of the bump electrode and thepad, wherein the electronic element is mounted on the semiconductordevice by a connection between the bump electrode and the pad and adeformation of the bump electrode and the thermosetting resin.
 8. Asemiconductor device, comprising: a semiconductor substrate having afirst surface and a second surface opposite to each other; a throughhole provided in the semiconductor substrate; a resin member provided inthe through hole and having a part protruding relative to the secondsurface; a through electrode provided in the through hole between theresin member and an inner surface of the through hole, a tip of thethrough electrode protruding relative to the second surface andoverlaying the protruding part of the resin member to form a bumpelectrode; an insulation film covers the inner surface of the throughhole; and a metal layer provided in the through hole between theinsulation film and the through electrode, a tip of the metal layerprotruding relative to the second surface and terminating at a locationbetween the through electrode tip of the through electrode and thesecond surface of the semiconductor substrate.
 9. The semiconductordevice according to claim 8, wherein the tip of the through electrodehas a curved surface.
 10. The semiconductor device according to claim 8,wherein the through electrode is elastically deformable together withthe resin member.
 11. The semiconductor device according to claim 8,wherein the through electrode has a tapered shape, the tapered shapebeing tapered toward the tip of the through electrode.
 12. Thesemiconductor device according to claim 8, wherein the through electrodeincludes at least one ductile metallic film.
 13. The semiconductordevice according to claim 8, wherein the insulating film provided in thethrough hole between the metal layer and an entirety of the innersurface of the through hole, the insulation film protruding relative tothe second surface.
 14. An electronic apparatus, comprising: thesemiconductor device according to claim 8; an electronic element facingthe semiconductor substrate, the electronic element including a padformed on the electronic element; and a thermosetting resin providedbetween the semiconductor device and the electronic element, thethermosetting resin being located outside of the bump electrode and thepad, wherein the electronic element is mounted on the semiconductordevice by a connection between the bump electrode and the pad and adeformation of the bump electrode and the thermosetting resin.